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Home  ❯  Blog  ❯  Plasma Treatment Machines: Key Applications in the Semiconductor Industry

Plasma Treatment Machines: Key Applications in the Semiconductor Industry

Plasma Treatment Machines: Key Applications in the Semiconductor Industry

  • Writen by Tina Jiao
  • September 29, 2024
  • Blog

Several plasma applications are finding extensive uses in the semiconductor industry. This surface cleaning technique has been at the forefront of key semiconductor applications, from increasing adhesion strength and wettability to decontaminating surfaces.

Plasma treatment machines exist in variations suitable for the semiconductor industry. It has also contributed immensely to the improved quality and reliability of semiconductors.

This article reveals plasma treatment machines, what they are, and how they have become prevalent in the face of modern semiconductor applications.

Understanding Plasma Treatment in the Semiconductor Industry

Plasma is produced from combining a gas with energy. The resulting plasma becomes electrically charged, leading to the possession of specific characteristics. Plasma treatment leverages this ionized gas to impose new surface properties on semiconductor materials.

Plasma treatments are effective in all industries, including the semiconductor industry. For example, plasma cleaning has become the standard for surface cleaning in this industry because of its incredible efficiency.

This particular plasma technology demonstrates consistent efficiency in removing all sorts of contaminants from semiconductor wafer surfaces. This remarkable tech combines energetic ions with UV light to rid surfaces of unwanted materials, ensuring that surfaces are clean and devoid of defects.

Plasma treatments have advanced the development and manufacture of microelectromechanical systems, integrated circuits, and other miniature devices. Some popular plasma treatments for semiconductor devices include reactive ion etching and plasma ashing.

Applications of Plasma Treatment in Semiconductor Manufacturing

There are several plasma treatment applications in semiconductor manufacturing and development. These various applications will be discussed below;

Surface cleaning and contaminant removal

Plasma has excellently outperformed other surface-cleaning techniques in the world of semiconductor devices.

Plasma Treatment Machines: Key Applications in the Semiconductor Industry

Plasma cleaning is a unique process used to decompose and vaporize unwanted items from material surfaces. This is an effective oil removal method used to clean substrate surfaces in this industry.

This method has become preferred not only for its dryness and cleanness but also because it does not leave residues behind. Also, the plasma cleaning process does not require chemicals or water, making it a more sustainable process.

Photoresist removal (plasma ashing)

The photoresist is one problem that plagued the semiconductor industry for as long as we can remember. Plasma has served as a reliable solution for dealing with the problem of photoresist. The actual plasma technology used in eradicating photoresist is called Plasma Ashing.

The operational principle of plasma ashing is simple – it uses oxygen plasma to target and remove photoresist layers on substrate surfaces. In this method, the target surface is exposed to low-pressure plasma.

This efficient plasma treatment is excellent for removing photoresists on wafers or PCBs. Benefits of plasma ashing include precise, residue-free removal without damaging underlying layers.

Surface activation and adhesion enhancement

Surface activation is an invaluable process in the semiconductor industry that prepares materials for subsequent applications.

This process is about using surface chemistry to alter material surfaces so they can be more receptive to incoming items.

The significance of surface activation to the semiconductor industry cannot be overemphasized, considering how it has enhanced adhesion and bonding. Through plasma etching, surface activation can be achieved.

The number one benefit of surface activation is it enhances bonding strength and overall device reliability.

Etching and pattern transfer

The most popular pattern transfer technology used in the semiconductor industry is etching.

This plasma treatment method is becoming increasingly popular in the development and manufacture of discrete devices and integrated circuits. It is used to enable the creation of micro- and nano-scale patterns.

Countless semiconductor manufacturers employ plasma etching to achieve high-resolution patterning necessary for sophisticated semiconductor devices.

Specific Semiconductor Products and Plasma Treatment Applications

Many semiconductor products implement one plasma treatment application or another. Learn about various semiconductor products and their different plasma treatment applications below;

Integrated circuits (ICs)

The basics of plasma in the electronics industry can be seen in the manufacture of semiconductor chips.

Plasma makes up about 30% of the semiconductor factory in recent times. Plasma has contributed majorly to the consistent advancements in the integrated circuit industry today. A typical example is the use of plasma etching and cleaning of wafers to create precise patterns.

Plasma has led to better product performance and increased reliability due to its ability to ensure higher accuracy of IC fabrication. Plasma is also partly responsible for the shrinking size of ICs.

 

Micro-electromechanical systems (MEMS)

Plasma treatment machines are used to manage MEMs and other semiconductor applications. This technology is influencing the fabrication of micro-electromechanical systems.

The fabrication methods used to produce MEMS devices have been significantly advanced through plasma treatment processes. Plasma treatment helps to enhance device functionality and miniaturization capabilities.

In other words, the combination of electrical and mechanical elements to form miniaturized devices has improved dramatically with plasma technologies.

LEDs (Light Emitting Diodes)

The application of plasma treatments in producing LED devices helps address several challenges. The challenges addressed by plasma treatments in LED production include enhanced surface cleaning before wire bonding.

Plasma treatment 
 for displays (OLED, LCD)

Plasma employs surface cleaning and etching to improve light extraction efficiency. The resulting benefits include increased brightness and better energy efficiencies of liquid-emitting diodes.

Solar cells

Plasma surface activation makes producing solar modules resistant to unfavorable weather elements possible. This is achieved through adhesive solutions that are stable, water-tight, and reliable.

Plasma treatment applications are employed in solar cells to improve quality, ensuring the successful production of weather-resistant and stable panels.

Plasma cleaning and surface texturing helps to enhance light absorption, boosting solar cell efficiency and power output.

Printed circuit boards (PCBs)

Plasma is one fast-growing technology in the manufacture of printed circuit boards. Plasma activation improves surface energy, creating a more convenient surface to which other items can adhere to.

Plasma cleaning is aimed at removing all contaminants from the surface of a PCB before commencing bonding.

Plasma treatment machines can also remove residues from a printed circuit board without ruining the pattern on the circuit board.

The overall benefit of this technology to the semiconductor industry is to ensure reliable adhesion of conductive layers and components.

Semiconductor packaging

Plasma treatments have become more necessary in the semiconductor industry as package sizes keep reducing with the introduction of more advanced items.

Plasma is an excellent choice for cleaning semiconductors and other related applications like chip packaging.

In this industry, plasma treatments are used to ensure surface activation to improve the adhesion of encapsulants and underfills. This development directly enhances the durability and reliability of packaged semiconductor devices.

Displays (OLED, LCD)

Displays, such as OLEDs and LCDs, leverage certain plasma properties to produce light . Plasma has made several things possible in the manufacture of display units. One of the things it does is encourage the production of massive screens with minimal materials.

With plasma, OLEDs and LCDs’ picture quality is magnificent because all pixels are individually lit. Not only do plasma treatments aid in improving display quality, but they also contribute to ensuring a longer lifespan.

Benefits of Plasma Treatment in the Semiconductor Industry

The benefits of plasma treatment applications in the semiconductor industry are numerous.

One benefit of plasma treatment is precision processing with minimal material damage. Plasma technologies are designed to ensure reduced material waste because of their precise processing abilities.

When plasma is used, it only reacts with the desired portion and does not compromise the bulk properties of the material in question.

Another benefit of plasma-bound solutions is that they enhance device performance, yield, and reliability. As such, it is no longer news that the performance and reliability of semiconductor devices have improved beyond what they used to be many decades back.

Plasma treatment processes have outpaced wet chemical treatment processes since they offer incredible advantages. Plasma treatments are more eco-friendly and more efficient than traditional chemical processes. No harsh chemicals are needed for plasma treatment processes.

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Choosing the Right Plasma Treatment Machine for Semiconductor Applications

Choosing the right plasma treatment machine is critical for achieving maximum outputs in semiconductor applications. To make the right choice, you need to consider several factors like material compatibility, precision, and processing speed requirements.

The more you can align your needs with the above factors, the higher the possibility of getting a plasma treatment machine that will serve you well.

Plasma treatment machines suited for semiconductor applications are available in different types, with some having advanced customization features that make them suitable for a wide range of semiconductor applications.

Future Trends in Plasma Treatment for Semiconductors

The future of plasma treatments for semiconductors is looking exceptionally bright. The current developments in plasma technologies indicate they will be perfect for microelectronics and other next-generation semiconductor devices.

Other potential growth areas include introducing AI chips, quantum computing, and advanced sensors to make the plasma treatment process more precise and efficient.

Conclusion

Plasma treatment is an effective, uniform, and cheap technique for modifying sophisticated electronic devices. This technology has positively influenced product reliability and performance in the semiconductor industry.

Are you ready to invest in plasma treatments but not sure where to start? Fari Plasma has got you covered with the best plasma treatment machines.

Author
Tina Jiao, Sales director of FARI, has 13+ years of experience in the plasma processor market in China. She is good at plasma treatment and plasma etching technology, and has served medium and large customers in many fields. If you have any questions, please feel free to contact.
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Fari was founded in 2011, is a professional manufacturing enterprise specializing in the research and development, production, sales and promotion of vacuum plasma cleaner and atmospheric plasma surface treatment technology equipment. 

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